In today’s vibration control systems, the dichotomy between active and passive systems is gradually becoming blurred, with TMC’s ‘Electro-Damp’ and ‘Stacis’ systems standing out as prime examples of how technology is evolving to address increasingly complex vibration control needs. ‘Electro-Damp’, a parallel type active vibration control system, demonstrates how these systems can be optimized to…
In today’s vibration control systems, the dichotomy between active and passive systems is gradually becoming blurred, with TMC’s ‘Electro-Damp’ and ‘Stacis’ systems standing out as prime examples of how technology is evolving to address increasingly complex vibration control needs.
‘Electro-Damp’, a parallel type active vibration control system, demonstrates how these systems can be optimized to enhance the efficiency of specific industrial tools. Particularly suited to high-precision tools such as those in semiconductor manufacturing, ‘Electro-Damp’ works in tandem with moving stage technology to cancel out motion-induced vibration, boosting throughput and yield.
On the other hand, the ‘Stacis’ system represents the pinnacle of serial type active vibration cancellation. This innovative solution utilizes a stiff rubber spring that not only supports the payload but also decouples it from the active control system. This creates a system that measures floor vibration rather than the payload. The results? An impressively broad bandwidth for vibration control, extending from below 1Hz to above 100Hz. Such systems like ‘Stacis’ have been invaluable for tools like electron microscopes that are highly sensitive to low-frequency floor vibrations.
Thus, in the quest for the optimal vibration isolation system, ‘active’ isn’t just a buzzword. It’s a commitment to technology that incorporates an inertial sensor, a feedback or feed-forward control loop, and an actuator, all working synergistically to manage and neutralize vibration. TMC is at the forefront of this transformative technology, pushing the boundaries of what’s possible in the field of vibration control.
Video TranscriptExpand ↓
TMC's electro dam, is an excellent example of a parallel type active vibration control system. And while these systems are limited, in terms of their active bandwidth for for floor vibration control, something like electric damp is really well suited for being designed into semiconductor or manufacturing tools like waveformetrology instruments that use an electron beam, and moving stage to position the the the wafer to inspect and move on. So canceling that stage motion is critical in improving the throughput and maximizing yield and throughput in semiconductor manufacturing. The next type of active vibration control is serial type active vibration cancellation. And with this system, it's actually a little bit easier to set up than an electric damp parallel type system. It's in comparison, quite simple yet advanced in its technology. It utilizes a rubber spring elastomer inside the isolator, so provides a very stiff and stable support of the payload. The the active control system is decoupled from the payload because it is in series with a rubber spring. So the high frequency rubber spring actually decouples the active control system from the payload. The control system is downward looking, so it's looking at the floor. It's measuring the vibration coming up from the floor, not the payload. And as a result, it has the largest bandwidth available for active vibration control down to below one hertz, and up to over our hunger terms. So this system is quite unique. TMC's Stasis system is a is a prime example of this technology, and it is the most advanced commercially available system using piezo electric actuators, inertial sensors to to measure full vibration down to very low frequency, and a very special rubber mal that has a frequency in the fifteen to twenty hertz boat twenty hertz, both vertically and horizontally. So common applications for this are actually supporting tools that have something like a vector dam built into them or pneumatic isolators, simple pneumatic isolators built into them like electron microscopes, SEMs, and TEMs are commonly supported by something like this because those tools are being installed in environments that have that have very low frequency vibration coming from the floor, which will limit the performance of the tools because they have pneumatic isolators built into them and they're very sensitive to flow vibration at low frequencies. So again, you know, there's an inertial sensor, there's a control system, an actuator, is this an active system? Absolutely, it is. And it's one of the not only the most advanced, but often the only choice for supporting tools in a harsh environment when low frequency is at home. So in summary, when you are looking for a vibration isolation system and you hear the word active or or you think you might need active vibration control you definitely wanna ask the question, does it have an inertial sensor? Is there a feedback or a feed forward control loop? And is there an actuator to react to the signal coming from the inertia sensor in the control system to cancel that vibration? So that's it for today. Again, I'm West Wigglesworth with TMC. See you next time.
